Dual Beam

Helios 5 CX

*年份:2021, working condition
詳細介紹

Helios 5 CX

The core instrument (Helios 5 CX) includes:
1. Dedicated Microscope Controller with xT Software v.17 .x
2. Support Computer with Window 10
3. 2 x 24" Widescreen LCD Monitor
4. Elstar Electron Column
5. Tomahawk HT Ion Column with Fast Ion Beam Blanker
6. 110x110 mm Eucentric Stage with Multi-purpose Holder
7. In-lens Detector TLD - with SE and BSED Modes
8. Secondary Electron Detector (SED)
9. Beam Current Measurement
10. Overview Camera
11. Integrated Plasma Cleaner
12. Sample Back-out Oven
13. Oil-free Pumping System